Properties of CrTiBN coatings fabricated by a hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and radio frequency (RF) sputtering
- Resource Type
- Conference
- Source
- 한국진공학회 학술발표회초록집. 2016-08 2016(8):554-554
- Subject
duty cycle hybrid coating system high power impulse magnetron sputtering radio frequency CrTiBN thin film nanoindentation scratch - Language
- Korean