A Piezo-driven Parallel XY Stage Using Antagonistic Arrangement of Actuating Mechanisms
- Resource Type
- Conference
- Source
- 한국생산제조학회 학술발표대회 논문집. 2014-09 2014(9):198-198
- Subject
Piezo actuator Antagonistic arrangement Flex-tensional mechanism Bidirectional operation - Language
- Korean
- ISSN
- 2508-5387