Method And Apparatus For Testing Particulate Contamination In Wafer Carriers
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Wafer carriers in an integrated circuit fab are tested for residual particle contamination by replacing the standard carrier door by a test cover having a gas inlet and outlet, counting the number of FM particles exiting the carrier during a flush cycle with a test gas having a known concentration of FM particles and either continuing processing if the number of FM particles is below a threshold, performing a purge with the test gas if the contamination is in a purge range, or sending the carrier out for cleaning if the number of FM particles is above the purge range.