A Fe-based Metallic Glass Bilayer Membrane for Biochip Micropump Application
- Resource Type
- Article
- Authors
- Y. F. Huang; Z. Y. Wang; Y. Y. Chen; C. C. Liao; Y. C. Tsai
- Source
- 한국농업기계학회 학술발표논문집. May 30, 2018 23(1):150
- Subject
- Bilayer membrane
Metallic glass
Electromagnetic actuation
Micropump
- Language
- Korean
This paper presents a Fe-based (Fe76Si9B10P5) metallic glass (MG) bilayer membrane for bio-chip micropump application. A Fe-based metallic glass integrated with a polydimethylsiloxane (PDMS) diaphragm is proposed and developed for an actuation membrane in this work. An actuation bilayer membrane integrated Fe-based metallic glass and PDMS diaphragm by the standard MEMS fabrication process is proposed and developed in this work. The permanent magnets on two sides are employed for polarizing the Fe-based metallic glass thin film. The magnetic field generated by the coil underneath the actuation membrane is used to attract and repel the actuation bilayer membrane. Different sputtering conditions were carried out for optimizing the Fe-based metallic glass process. The deflection of the fabricated actuation bilayer membrane was measured by laser displacement sensor. As the frequency continuously increases, the magnetic field generated by the coil decreases. The maximum magnetic field is 140 G. When 1 Hz AC 20 voltage was applied to the magnetic coil, the maximum deflection of the actuation bilayer membrane is 5 μm. The characterization experiments reveal that the Fe-based MG actuation membrane can be driven by the external electromagnetic force.