글라스 기판 위에 증착된 Zin Aluminate 박막의 열처리를 통한 소수성 특성의 향상
Enhancement of Hydrophobicity by a Heat Treatment of Zinc Aluminate Thin Film Deposited on Glass Substrate
- Resource Type
- Article
- Authors
- 서상영 / Sang-young Seo; 윤순길 / Soon-gil Yoon
- Source
- 전기전자재료학회논문지(J. Korean Inst. Electr. Electron. Mater. Eng.) / Journal of the Korean Institute of Electrical and Electronic Material Engineers. Jul 01, 2020 33(4):249
- Subject
- Zinc-aluminate
Hydrophobicity
Surface area
Oxygen vacancy
Oxygen plasma treatment
- Language
- Korean
- ISSN
- 1226-7945
An 80 nm thick zinc aluminate thin film was deposited on a glass substrate via radio-frequency (rf) magnetron sputtering and heat treated to analyze changes in the wetting angles due to a surface modification. The thin films were modified from hydrophilic to hydrophobic by a simple thermal treatment. The surface modification from a heat treatment increased the wetting angles up to 111°, which was explained by the relationship with the excess surface area. The wetting angles of the annealed thin films decreased with increasing exposure time under ambient conditions, which was attributed to the oxygen vacancies in the films that were introduced during deposition. The annealed thin films were treated by ionized oxygen via oxygen plasma. After the oxygen plasma treatment, the decreased wetting angles were maintained at ~95° for 11 days.