센서 , 기능성박막 : 세라믹 다이어프램을 이용한 후막 스트레인 게이지 압력센서
Sensor , Thin Film : Thick - Film Strain - gage Ceramic - Pressure Sensor
- Resource Type
- Article
- Source
- 전기전자재료학회논문지(J. Korean Inst. Electr. Electron. Mater. Eng.) / Journal of the Korean Institute of Electrical and Electronic Material Engineers. Dec 15, 2001 14(12):987
- Subject
- Language
- Korean
- ISSN
- 1226-7945