Although significant progress has been made in synthesizing visually realistic face images by Generative Adversarial Networks (GANs), there still lacks effective approaches to provide fine-grained control over the generation process for semantic facial attribute editing. In this work, we propose a novel cross channel self-attention based generative adversarial network (CCA-GAN), which weights the importance of multiple channels of features and archives pixel-level feature alignment and conversion, to reduce the impact on irrelevant attributes while editing the target attributes. Evaluation results show that CCA-GAN outperforms state-of-the-art models on the CelebA dataset, reducing Fréchet Inception Distance (FID) and Kernel Inception Distance (KID) by 15~28% and 25~100%, respectively. Furthermore, visualization of generated samples confirms the effect of disentanglement of the proposed model.