Tester Interface Software (TIS) provides all software functions that are necessary for a testing device to perform the test process on a memory semiconductor package from the time the device is put into the test equipment until the device is discharged from the equipment. TIS should perform the same work over all types of equipment regardless of their tester models. However, TIS has been developed and managed independently of the tester models because there are various equipment and computer models that are used in the test process. Therefore, more maintenance, time and cost are required for development, which adversely affects the quality of the software, and the problem becomes more serious when the new tester model is introduced. In this paper, we propose the Cross-platform Tester Interface Software (CTIS) framework, which can be integrated and operated on heterogeneous equipment and OSs. CTIS uses Qt library and can be operated on the unix, linux and windows which operating systems for tester, and applies the wrapper technique to provide compatibility for system libraries from heterogeneous testers. We can solve the similar problems in other semiconductor process which is based lots of equipments, if we use the CTIS techniques.