Effect of N2 micro plasma treatment on initial growth of GaN by MOMBE / MOMBEを用いたGaN初期成長に与えるN2マイクロプラズマ処理の効果
- Resource Type
- Journal Article
- Source
- JSAP Annual Meetings Extended Abstracts. 2014, :3375
- Subject
20a-PG1-16 GaN III-V族窒化物結晶 MOMBE 結晶工学 - Language
- Japanese
- ISSN
- 2436-7613