Fabrication of Al-polar AlN layers by Liquid Phase Epitaxy using Ga-Al solution under low oxygen partial pressure / Ga-Alフラックスを用いた液相成長法による低酸素分圧下でのAl極性AlN膜の作製
- Resource Type
- Journal Article
- Source
- JSAP Annual Meetings Extended Abstracts. 2014, :3227
- Subject
18p-C5-17 AlN III-V族窒化物結晶 LPE 結晶工学 - Language
- Japanese
- ISSN
- 2436-7613