Characterization of Mechanical Nonlinear effect in Piezoelectric MEMS Vibration Energy Harvesters using Lead-Free BiFeO3 Film / 非鉛BiFeO3圧電膜を用いた圧電MEMS振動発電素子の非線形特性
- Resource Type
- Journal Article
- Source
- JSAP Annual Meetings Extended Abstracts. 2020, :894
- Subject
8p-Z17-11 BiFeO3 MEMS vibration energy harvester エナジーハーベスティング 強誘電体薄膜 振動発電 薄膜・表面 - Language
- Japanese
- ISSN
- 2436-7613