Performance Improvement of a High-temperature Stress Sensor Incorporated with Flat Pores through a Solid State Foaming Method / 固相発泡により扁平気孔を導入した高温圧力センサーの特性向上
- Resource Type
- Journal Article
- Authors
- Akira KISHIMOTO; Hidetaka HAYASHI; Takashi TERANISHI; Yuuki TAKAMURO; 寺西 貴志; 岸本 昭; 林 秀考; 高室 佑基
- Source
- 粉体および粉末冶金 / Journal of the Japan Society of Powder and Powder Metallurgy. 2017, 64(2):68
- Subject
- doping
pore
pressure sensor
superplasticity
- Language
- Japanese
- ISSN
- 0532-8799
1880-9014
Aiming for an application to the high temperature pressure sensor, semiconductive ceramics foam incorporated with a narrow slit has been fabricated by our innovated superplastically foaming method. We investigated the pressure dependence of resistance on the zinc oxide based foaming body, by changing the fabrication process and composition. The resistance of the sample decreased with an increase in pressure both at room and high temperatures. The performances of this type of sensor such as sensitivity and linearity have been improved by doping ambivalent atoms (Ag and Li) into the matrix.