OS1409-285 Effect of Plasma Nitriding on the Strength of Multi-Functional Fine Protrusions Formed by Sputter-Etching / OS1409-285 スパッタエッチングにより形成した多機能微細突起物の強度に及ぼすプラズマ窒化の影響
- Resource Type
- Journal Article
- Authors
- Akihiro YAMAMOTO; Keijiro NAKASA; Rongguang WANG; Tsunetaka SUMOMOGI; 中佐 啓治郎; 山本 旭宏; 李木 経孝; 王 栄光
- Source
- The Proceedings of the Materials and Mechanics Conference. 2015, 28
- Subject
- Compressive Strength
Fine Protrusion
Indentation Test
Plasma Nitriding
Sputter Etching
Stainless Steel
- Language
- Japanese
- ISSN
- 2424-2845
Argon ion sputter-etching of SUS420J2 martensitic stainless steel and SUS316 austenitic stainless steel were carried out to form fine protrusions on the specimen surface by using a radio-frequency magnetron sputter-apparatus. Plasma-nitriding was applied to the protrusions by using nitrogen gas of 0.53 Pa mixed with argon gas of 0.67 Pa at a power of 50W for 1.8ks. Micro-Vickers hardness tests on the top of cone-shaped protrusions with diameter of about 20 μm of SUS420J2 steel showed that the plasma-nitriding produces more than three times larger compressive strength than that of the as-sputter-etched protrusions. Nano indentation tests on ridge-shaped protrusions with sizes smaller than 500 nm of SUS316 steel also showed that the compressive strength of the plasma-nitrided protrusion is about twice as large as that of the as-sputter-etched one.