Barrier layer thickness dependence in GaInN/GaN superlattice characterized by in situ X-ray diffraction measurement / その場観察X回折法によるGaInN超格子の臨界膜厚のバリア層膜厚依存性評価
- Resource Type
- Journal Article
- Source
- JSAP Annual Meetings Extended Abstracts. 2015, :3112
- Subject
14a-1D-10 III-V族窒化物結晶 MOVPE in situ X-ray diffraction measurement superlattice その場観察X線回折測定 成長(MOVPE) 有機金属気相成長法 結晶工学 超格子 - Language
- Japanese
- ISSN
- 2436-7613