Femtosecond Laser Processing with Adaptive Optics based on Machine Learning / 機械学習にもとづく補償光学を用いたフェムト秒レーザー加工
- Resource Type
- Journal Article
- Authors
- Satoshi Hasegawa; Yoshio Hayasaki; 早崎 芳夫; 長谷川 智士
- Source
- 電気学会論文誌C(電子・情報・システム部門誌) / IEEJ Transactions on Electronics, Information and Systems. 2022, 142(4):470
- Subject
- adaptive optics
computer-generated hologram
femtosecond laser processing
machine learning
neural network
ニューラルネットワーク
フェムト秒レーザー加工
機械学習
補償光学
計算機ホログラム
- Language
- Japanese
- ISSN
- 0385-4221
1348-8155
Adaptive optics for compensating wavefront aberrations is important because the aberrations cause focal spot distortion leading to loss of resolution in laser processing. In this paper, femtosecond laser processing with adaptive optics based on machine learning was demonstrated. The aberrations existing in the laser processing system were continuously predicted by the trained neural network with an update period of 36 ms and were compensated by a liquid crystal spatial light modulator. In the experiment, the machine learning-based adaptive optics reduced the wavefront error in the laser processing system to most one-ninth. Furthermore, parallel laser processing by a computer-generated hologram displayed on the spatial light modulator was also demonstrated while dynamically compensating the aberrations in the system.