The purpose of this paper is to investigate various factors affecting the efficiency of China IC industry, reflecting the resource utilization and overall development level of China IC industry. In this paper, three input indicators (R&D Expenditure, Cash paid to and for employees, Total fixed assets) and two output indicators (Net profit, Sales revenue) were selected for 17 listed companies in the IC industry with operating profit of less than 1 billion yuan in 2018 and applied the technology efficiency theory and DEA analysis method to analyze the relative efficiency of the output base. The study found that one of the 17 companies analyzed was efficient, two were inefficient on an inadequate scale, and the rest were inefficient due to insufficient production technology, scale and management level. This study argues that enterprises should reduce resource input appropriately and strengthen scientific and technological innovation management to maximize resource utilization efficiency. Therefore, this study has important practical significance for improving the efficiency of IC enterprises. The Malmquist method will be used to study the total factor productivity of small and Medium-sized companies in IC industry.