Atomic Layer Deposition of MoSe2 Using New Selenium Precursors
- Resource Type
- Article
- Authors
- Zazpe, Raul; Charvot, Jaroslav; Krumpolec, Richard; Hromádko, Luděk; Pavliňák, David; Dvorak, Filip; Knotek, Petr; Michalicka, Jan; Přikryl, Jan; Ng, Siowwoon; Jelínková, Veronika; Bureš, Filip; Macak, Jan M.
- Source
- In FlatChem May 2020 21
- Subject
- Language
- ISSN
- 2452-2627