Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications
- Resource Type
- Article
- Authors
- Chaluvadi, Sandeep Kumar; Wang, Zhe; Carvalho de Araújo, Laryssa M.; Orgiani, Pasquale; Polewczyk, Vincent; Vinai, Giovanni; Rousseau, Olivier; Pierron, Victor; Pautrat, Alain; Domengès, Bernadette; Schlom, Darrell G.; Méchin, Laurence
- Source
- In Applied Surface Science 30 March 2022 579
- Subject
- Language
- ISSN
- 0169-4332