Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask
- Resource Type
- Article
- Authors
- Wu, Meiyi; de Marneffe, Jean-François; Opsomer, Karl; Detavernier, Christophe; Delabie, Annelies; Naujok, Philipp; Caner, Özge; Goodyear, Andy; Cooke, Mike; Saadeh, Qais; Soltwisch, Victor; Scholze, Frank; Philipsen, Vicky
- Source
- In Micro and Nano Engineering August 2021 12
- Subject
- Language
- ISSN
- 2590-0072