High-Q on-chip transmission line for CMOS MMIC applications
- Resource Type
- Conference
- Authors
- Fahimnia, Mehrdad; Fahimnia, Zahra; Mohammad-Taheri, Mahmoud; Safavi-Naeini, Safieddin
- Source
- 2011 19th Iranian Conference on Electrical Engineering Electrical Engineering (ICEE), 2011 19th Iranian Conference on. :1-1 May, 2011
- Subject
- Fields, Waves and Electromagnetics
Engineered Materials, Dielectrics and Plasmas
Components, Circuits, Devices and Systems
Transmission line (TL)
Microwave integrated circuit (MMIC)
CMOS
Q (quality factor)
- Language
- ISSN
- 2164-7054
Summary from only given. A high quality factor transmission line structure with shielded ground plane and curved side-walls is proposed for CMOS MMIC applications. The structure is optimized, fabricated and characterized up to 40 GHz. Instead of conventional open, short and thru de-embedding methods which consume a large chip area, a simple yet accurate de-embedding method using lines with two different lengths is employed. Simulated and measured data are compared which shows a good agreement between them. The extracted line parameters are studied and it is seen that even with the shielded ground; the quality factor of the line degrades at very high frequency due to the substrate loss.