High-Sensitivity Electrochemical Angular Accelerometer Relying on Soi-Based Microelectrodes
- Resource Type
- Conference
- Authors
- Liang, Tian; Zhang, Mingbo; Hu, Lintao; Sun, Zhenyu; Zhu, Maoqi; Chen, Deyong; Chen, Jian; Wang, Junbo
- Source
- 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :80-83 Jun, 2023
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Robotics and Control Systems
Accelerometers
Vibrations
Micromechanical devices
Microelectrodes
Electric potential
Sensitivity
Transducers
Rotational vibration sensor
angular accelerometer
electrochemical
microfabrication
microelectrodes
- Language
- ISSN
- 2167-0021
This paper reports a high-sensitivity electrochemical angular accelerometer relying on SOI-based microelectrodes featured with an obviously promoted sensitivity (380 V/(rad/s 2 ) vs. 100 V/(rad/s 2 )) and noise (7.94×10 -8 rad/s 2 /Hz 1/2 vs. 5.62×10 -6 rad/s 2 /Hz 1/2 ). This improvement was enabled by using the novel structure of SOI-based microelectrodes where the area of microelectrodes was effectively enlarged, which indicates the potential in the field of rotational seismology.