Growth of 150 mm 4H-SiC Epilayers with Low Surface Roughness by a Hot-Wall Reactor on 4° off- Axis Substrates
- Resource Type
- Conference
- Source
- 2023 20th China International Forum on Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS) Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS), 2023 20th China International Forum on. :10-13 Nov, 2023
- Subject
Components, Circuits, Devices and Systems Engineered Materials, Dielectrics and Plasmas Power, Energy and Industry Applications Mass production X-ray scattering Epitaxial layers Doping Surface roughness Epitaxial growth Rough surfaces - Language