In this paper, performance bounds for joint estimation of the Multiple-input multiple-output (MIMO) radar deviations and target parameters are discussed. Due to the wide spatial distribution of MIMO radar, it inevitably generates position and velocity deviations, which deteriorate the performance of target parameter estimation. The signal model is reconstructed based on direct-path waves and target echoes. And the performance bounds of the system are derived using Cramer-Rao lower bound (CRLB). The numerical simulation results show that the CRLB of radar deviations estimation under the method of this paper is lower, which improves the estimation performance of the target parameters.