Local Thermophysical Properties Measurements on Polymers using Doped Silicon SThM Probe: Uncertainty Analysis and Interlaboratory Comparison
- Resource Type
- Conference
- Authors
- Guen, Eloise; Chapuis, Pierre-Olivier; Klapetek, Petr; Puttock, Robb; Hay, Bruno; Allard, Alexandre; Maxwell, Tony; Renahy, David; Valtr, Miroslav; Martinek, Jan; Gomes, Severine
- Source
- 2018 24rd International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) Thermal Investigations of ICs and Systems (THERMINIC), 2018 24rd International Workshop on. :1-6 Sep, 2018
- Subject
- Components, Circuits, Devices and Systems
Uncertainty
Thermal conductivity
Temperature measurement
Conferences
Integrated circuits
Silicon
Conductivity
- Language
- ISSN
- 2474-1523
We first assess Scanning Thermal Microscopy (SThM) with a self-heated doped silicon nanoprobe as a method for the simultaneous identification of the local thermal conductivity and phase transition temperature of polymeric materials. In a second step, results of an inter laboratory comparison and an uncertainty analysis involving three laboratories applying the same protocol of phase transition temperature measurement allow evaluating the repeatability, the reproducibility and the reliability of the method.