Reversible and Irreversible Polarization Degradation of Hf0.5Zr0.5O2 Capacitors with Coherent Structural Transition at Elevated Temperatures
- Resource Type
- Conference
- Authors
- Gao, Zhaomeng; Xin, Tianjiao; Liu, Cheng; Xu, Yilin; Wang, Yiwei; Zheng, Yunzhe; Wang, Rui; Li, Xiaotian; Zheng, Yonghui; Du, Kai; Su, Diqing; Zhang, Zhaohao; Yin, Huaxiang; Zhang, Weifeng; Li, Chao; Lin, Xiaoling; Jiang, Haitao; Song, Sannian; Song, Zhitang; Cheng, Yan; Lyu, Hangbing
- Source
- 2024 IEEE International Reliability Physics Symposium (IRPS) International Reliability Physics Symposium (IRPS), 2024 IEEE. :1-5 Apr, 2024
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
Degradation
Temperature
Transmission electron microscopy
Microscopy
Capacitors
Iron
Regulation
Ferroelectric memory
Hafnia-based ferroelectric capacitor
Polarization degradation
Coherent phase boundary
- Language
- ISSN
- 1938-1891
In this study, we investigated the reversible and irreversible polarization degradation of hafnia-based ferroelectric capacitors (FeCAPs) using the state-of-the-art spherical aberration corrected transmission electron microscope (Cs-TEM) with realtime temperature changes. The key observations are as follows: (1) Rapid thermal annealing (RTA) results in incomplete formation of the orthorhombic (o-) phase in the ferroelectric (FE) material, leading to a coherent phase boundary (CPB) between o- and tetragonal (t-) structures. (2) The movement of the o-/t-CPB with temperature corresponds to reversible changes in polarization of hafnia-based FeCAPs. (3) Irreversible degradation in polarization occurs due to migration of the o-/monoclinic (m-) CPB with temperature. These findings provide a new perspective for evaluating the stability of the o-phase in fluorite-type FE materials and offer guidance for optimizing their properties through regulation strategies.