Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns through Structure Design and Electrode Arrangement
- Resource Type
- Conference
- Authors
- Lin, Po-Chun; Hsu, Chih-Chen; Yang, Hui-Ming; Lin, Hung-Yu; Chen, Si-Han; Fang, Weileun
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :717-720 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Electrodes
Micromechanical devices
Actuators
Shape
Switches
Springs
Stress
Dual-axis Piezoelectric MEMS Micromirror
PZT Thin Film
Lissajous Scanning
AMR Application
- Language
- ISSN
- 2160-1968
This study presents a novel structure and electrode design to realize the dual-axis piezoelectric MEMS scanning mirror. The design features include: (1) Two-stage curved actuator array for 2-D scanning: each curved actuator consists of the trapezoid-plate and ring-plate units driven respectively by different electrodes. Through the proposed structure and electrode designs, different aspect ratios of scanning patterns are achieved by simply altering the input-ports of driving signals. (2) Electrode pattern: the electrode pattern is designed based on stress distributions of the structure to improve output displacement. (3) S-shaped spring: spring width is designed to reduce stress during scanning. Measurement results demonstrate the proposed design reaches 30° for X-axis scanning at 5.45 kHz (8 V pp ) and 20° for Y-axis at 5.2 kHz (6 V pp ). It can also show Lissajous scanning patterns with various aspect ratios by easily applying driving signals to different actuator units.