Pound-Drever-Hall Locking System for Precise Temperature Measurement Based on Silicon Ring Resonators
- Resource Type
- Conference
- Authors
- Zhu, Xiantao; You, Minmin; Shi, Yuzhi; Yang, Bin; Liu, Jingquan
- Source
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Micro Electro Mechanical Systems Conference (MEMS), 2022 IEEE 35th International Conference on. :130-133 Jan, 2022
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Temperature sensors
Temperature measurement
Fluctuations
Resonant frequency
Measurement by laser beam
Laser feedback
Laser stability
PDH locking system
Triple point system
Error signal
Micro-ring resonator
Temperature stability
- Language
- ISSN
- 2160-1968
Inspired by laser frequency locking, this paper reports a Pound-Drever-Hall (PDH) locking system for the precise measurement of silicon-based micro-ring temperature sensors. The resonant wavelength shift of the ring is transformed to the voltage error signals feedback to the laser. The frequency locking system has a high resolution that can characterize the wavelength drift of 10 –4 pm. And the stability of the silicon-based micro-ring temperature sensor is first characterized at the triple point of water with the proposed system. The result shows that the fabricated device has a temperature fluctuation of 47.97 mK in 500 s. Besides, this PDH locking system can also stabilize the frequency of the laser.