An electron beam microcolumn for multi-beam applications
- Resource Type
- Conference
- Authors
- Kratschmer, E.; Kim, H.S.; Thomson, M.G.R.; Lee, K.Y.; Rishton, S.A.; Yu, M.L.; Chang, T.H.P.
- Source
- IVMC '95. Eighth International Vacuum Microelectronics Conference. Technical Digest (Cat. No.TH8012) Vacuum microelectronics Vacuum Microelectronics Conference, 1995. IVMC., 1995 International. :523 1995
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Electron beams
Zirconium
Electrodes
Biomembranes
Electron emission
Optical devices
System testing
Inspection
- Language
Summary form only given. Highly miniaturized electron beam columns based on a field emission source and microfabricated electron optical components have been developed. A 1 keV microcolumn operating with a miniaturized Zr/O/W Schottky emitter has been successfully evaluated for the first time. This paper will present the results obtained with the new microcolumn and discuss present efforts to further improve column performance with respect to resolution, beam current, and deflection field size.