A CMOS-MEMS Three-Axis Magnetic Sensor with a Ferromagnetic Concentrator
- Resource Type
- Conference
- Source
- 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1547-1550 Jun, 2023
- Subject
Bioengineering Components, Circuits, Devices and Systems Fields, Waves and Electromagnetics Photonics and Electrooptics Robotics and Control Systems Micromechanical devices Semiconductor device measurement Lorentz covariance Transducers Sensitivity Magnetic field measurement Magnetic sensors CMOS MEMS sensor Lorentz force - Language
- ISSN
- 2167-0021