Ion energy measurements in vacuum arc deposition
- Resource Type
- Conference
- Source
- Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum Discharges and electrical insulation in vacuum Discharges and Electrical Insulation in Vacuum, 1996. Proceedings. ISDEIV., XVIIth International Symposium on. 2:937-940 vol.2 1996
- Subject
Engineered Materials, Dielectrics and Plasmas Fields, Waves and Electromagnetics Power, Energy and Industry Applications Energy measurement Vacuum arcs Elementary particle vacuum Plasma measurements Cathodes Plasma properties Tin Plasma diagnostics Coatings Orifices - Language