A dual-mass capacitive-readout accelerometer operated near pull-in
- Resource Type
- Conference
- Authors
- Woestyn, P.; Raman, J.; Rombouts, P.; Weyten, L.; De Baets, P.
- Source
- 2010 53rd IEEE International Midwest Symposium on Circuits and Systems Circuits and Systems (MWSCAS), 2010 53rd IEEE International Midwest Symposium on. :1185-1188 Aug, 2010
- Subject
- Components, Circuits, Devices and Systems
Power, Energy and Industry Applications
Accelerometers
Springs
Capacitors
Voltage
Stators
Noise reduction
Circuit noise
Capacitance
Information systems
Production systems
- Language
- ISSN
- 1548-3746
1558-3899
A mechanical two-mass configuration and a readout circuit for a single-axis capacitive-readout accelerometer with ΣΔ force-feedback is presented. The system reduces electrical and quantisation input-referred noise through the use of negative springs, reduced gaps in the readout capacitors and maximised readout voltage. A theoretical analysis and simulation results are discussed.