Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application
- Resource Type
- Conference
- Authors
- Tiedke, S.; Prume, K.; Schmitz-Kempen, T.
- Source
- 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on. :702-702 May, 2007
- Subject
- Engineered Materials, Dielectrics and Plasmas
Components, Circuits, Devices and Systems
Piezoelectric films
Micromechanical devices
Sensor arrays
Piezoelectric materials
Strain measurement
Stress measurement
Microelectromechanical systems
Control systems
Electromechanical sensors
Sensor phenomena and characterization
- Language
- ISSN
- 1099-4734
2375-0448
The electrical and electromechanical properties of piezoelectric thin films were measured using different measurement procedures including a new method which combines the measurement of both the effective longitudinal and transverse piezoelectric coefficients on the same sample under precisely defined homogeneous mechanical strain utilizing a 4-point bending setup. Stress and corresponding strain distributions in the film were verified by finite element simulations.