A new downsized HVIC with high ESD tolerance
- Resource Type
- Conference
- Authors
- Tanaka, Takahide; Yamaji, Masaharu; Jonishi, Akihiro; Ohashi, Hidetomo; Sumida, Hitoshi
- Source
- 2017 29th International Symposium on Power Semiconductor Devices and IC's (ISPSD) Power Semiconductor Devices and IC's (ISPSD), 2017 29th International Symposium on. :175-178 May, 2017
- Subject
- Components, Circuits, Devices and Systems
High voltage integrated circuit (HVIC)
Electrostatic discharge (ESD)
Self-shielding
- Language
- ISSN
- 1946-0201
To achieve a downsized high voltage integrated circuit (HVIC) with high electrostatic discharge (ESD) tolerance, we have proposed the improved self-shielding technique in which a high voltage junction termination (HVJT) diode works as a protection diode of high voltage Neh MOSFETs. This new technique is more effective not only in improving ESD tolerance but also in downsizing.