Monolithic integration of a tunable photodetector based on InP/air-gap Fabry-Pérot filters
- Resource Type
- Conference
- Authors
- Kusserow, Thomas; Zamora, Ricardo; Sonksen, Julian; Dharmarasu, Nethaji; Hillmer, Hartmut; Nakamura, Tetsuji; Hayakawa, Tetsuo; Vengatesan, Balasubramanian
- Source
- 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on. :134-135 Aug, 2008
- Subject
- Photonics and Electrooptics
Components, Circuits, Devices and Systems
Communication, Networking and Broadcast Technologies
Engineered Materials, Dielectrics and Plasmas
Indium phosphide
Tuning
Detectors
Electrostatics
Epitaxial growth
Distributed Bragg reflectors
Substrates
InP
GaInAs
photodetector
pin photodiode
near infrared
air-gap DBR
tunable filters
- Language
- ISSN
- 2160-5033
2160-5041
We present a tunable photodetector MEMS device consisting of an InP/air-gap Fabry-Pérot filter combined with a pin-photodiode structure. Epitaxial growth and advanced surface micromachining are used for the monolithic integration of both devices. Special process steps regarding detector geometry, photo current and signal quality have been investigated to assure high performance.