A sub-0.1°/h bias-instability MEMS gyroscope using resonant constant-frequency driving technique
- Resource Type
- Conference
- Authors
- Wu, Haibin; Zheng, Xudong; Shen, Yaojie; Wang, Xuetong; Jin, Zhonghe; Ma, Zhipeng
- Source
- 2021 IEEE Sensors Sensors, 2021 IEEE Sensors. :1-4 Oct, 2021
- Subject
- Engineering Profession
General Topics for Engineers
Micromechanical devices
Q-factor
Time-frequency analysis
Capacitors
Resonant frequency
Real-time systems
Capacitive sensors
MEMS gyroscopes
resonant constant-frequency
linear tuning triangular capacitors
- Language
- ISSN
- 2168-9229
The work illustrates a resonant constant-frequency (RCF) driving technique used in a MEMS gyroscope which has linear frequency-tuning triangular capacitors. Differing from that conventional driving technique where the gyroscope excitation frequency is time-varying, the RCF strategy assures that the excitation frequency and resonant frequency are equal and constant in the gyroscope drive mode by means of frequency-tuning feedback. As a result, RCF can eliminate effects of excitation-frequency instability and drift on gyroscope output performance. Combining RCF with real-time automatic mode-matching, the tested gyroscope with sense-mode quality factor of 26.75k has achieved bias instability of 0.09 °/h and angle random walk of 0.0087°/√h.