Multi-Mode Piezoelectric Micromachined Tranducers for Multi-Channel Acoustic Power Transfer and Data Telemetry
- Resource Type
- Conference
- Authors
- Zhang, Teng; Seshia, Ashwin A.
- Source
- 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1679-1682 Jun, 2023
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Robotics and Control Systems
Ultrasonic transducers
Ultrasonic imaging
Sensitivity
Power demand
Ultrasonic transducer arrays
Wireless power transfer
Data transfer
Piezoelectric micromachined ultrasonic transducer (PMUT)
multi-frequency operation
wireless power transfer
data telemetry
- Language
- ISSN
- 2167-0021
This paper reports on a piezoelectric micromachined ultrasonic transducer (PMUT) with a customized electrode design based on distinctive mode shapes, which enables a single transducer to realize acoustic power transfer and multi-channel data telemetry simultaneously. A prototype device is tested for concurrent 2-channel functionality in wireless power transfer and data telemetry for simultaneous transmission of carrier signals at frequencies of 101.45 kHz and 828 kHz corresponding to specific device modes. An output power transfer of 1.52 μW and data rate of 200 kbps is demonstrated across a pair of PMUT devices in air for a separation of 1 cm.