Electrical and structural properties of nanotetrapod zinc oxide thin films prepared with different deposition temperature
- Resource Type
- Conference
- Authors
- Azhar, N. E. A.; Shariffudin, S. S.; Affendi, I. H. H.; Shafura, A. K.; Saurdi, I.; Ishak, A.; Rusop, M.
- Source
- 2014 International Symposium on Technology Management and Emerging Technologies Technology Management and Emerging Technologies (ISTMET), 2014 International Symposium on. :188-192 May, 2014
- Subject
- Communication, Networking and Broadcast Technologies
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
General Topics for Engineers
Power, Energy and Industry Applications
Zinc oxide
Temperature measurement
Films
Temperature
Conductivity
X-ray diffraction
Nanotetrapod ZnO
Thermal-CVD
deposition temperature
electrical and structural properties
- Language
Nanotetrapod zinc oxide (ZnO) thin films have been deposited by thermal chemical vapor deposition (TCVD) technique. The films were deposited at 700°C and 800°C to study the temperature effect of physical properties of the nanotetrapod ZnO thin films. From XRD result shows the highest peak can observed from sample 700°C at (002) orientation. It was found that the size of nanotetrapod increased with increased of deposition temperature. The energy dispersive X-ray spectrometer (EDX) spectrum shows that the grown product contains zinc and oxygen only. At 800°C show the minimum of resistivity for the thin film which is 1.10 ohm. cm. Photoluminescence measurement shows a sharp peak ultraviolet emission at 380 nm and high intensity visible peak at 700°C because of defect due to oxygen vacancy and crystallization of ZnO nanotetrapod.