Monolithic system featuring a gold nanowire array on a CMOS chip for biosensing applications
- Resource Type
- Conference
- Authors
- Livi, Paolo; Rothe, Joerg; Stettler, Alexander; Chen, Yihui; Hierlemann, Andreas; Guzenko, Vitaliy A.
- Source
- 2012 IEEE Sensors Sensors, 2012 IEEE. :1-4 Oct, 2012
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Signal Processing and Analysis
Nanobioscience
Gold
CMOS integrated circuits
Semiconductor device measurement
Current measurement
Sensors
Electrical resistance measurement
- Language
- ISSN
- 1930-0395
We present a monolithic CMOS-based biosensor system comprising an array of gold nanowires and the signal-conditioning circuitry on the same chip. Different numbers of parallel nanowires have been patterned on the chip via e-beam lithography and lift-off process after the CMOS fabrication. The on-chip circuitry monitors the resistance of the nanowires by applying a constant voltage and measuring the respective current. The analog signal is then digitized on chip and transmitted. The system has been successfully fabricated and tested. I–V curves of the bare nanowires as well as resistance changes for different gold nanowires after applying NaCl solution onto the chip are shown.