An Analytical Model to Predict Extrinsic Aging in BAW Resonators
- Resource Type
- Conference
- Authors
- Segovia-Fernandez, Jeronimo; Yen, Ernest Ting-Ta; Rojas, Javier; Tran, Thu; Chowdhury, Mahmud; Smeys, Peter
- Source
- 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF), 2020 Joint Conference of the IEEE International. :1-4 Jul, 2020
- Subject
- Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Aging
Stress
Analytical models
Mathematical model
Strain
Resonators
Resonant frequency
BAW resonator
epoxy
aging
thermal stress
creep
- Language
- ISSN
- 2375-0448
This manuscript introduces a 1D analytical model to predict the Bulk Acoustic Wave (BAW) resonator aging when it is due to package stress relaxation. Classical micro-acoustic resonator aging models rely on a logarithmic function to estimate the 10-year instability. However, this function is fitted through experiments and does not take into account the physical stress phenomenon. Instead, our proposed analytical model computes the frequency drift by relating the thermally-induced stress in BAW to the creep response of attached epoxy. To validate the model, we design an experiment in which a type of BAW resonator known as DBAR is attached to a single epoxy layer and subjected to different baking conditions.