Micromachined mid-infrared emitter for fast transient temperature operation for optical gas sensing systems
- Resource Type
- Conference
- Authors
- Hildenbrand, Jurgen; Kurzinger, Andreas; Peter, Carolin; Moretton, Emmanuel; Wollenstein, Jurgen; Naumann, Falk; Ebert, Matthias; Korvink, Jan
- Source
- 2008 IEEE Sensors Sensors, 2008 IEEE. :297-300 Oct, 2008
- Subject
- Signal Processing and Analysis
Components, Circuits, Devices and Systems
Temperature sensors
Stimulated emission
Optical sensors
Pollution measurement
Optical filters
Suspensions
Wavelength measurement
Biomembranes
Electromagnetic wave absorption
Optical variables control
- Language
- ISSN
- 1930-0395
A novel micromachined thermal emitter for fast transient temperature operation is presented. Most commercial available thermal emitters are not able to operate in a pulsed mode. The spider type hotplate concept promises an excellent mechanical stability together with high thermal decoupling. The thermal emitter is fabricated using silicon on insulator (SOI) technology and KOH-etching. The emitter is heated with a Pt-meander structure and the device is mounted in a TO-5 housing. Different suspensions structures as well as hotplate sizes were realized and mechanical and thermal characterizations were performed. Beside the possibility of pulsed operation, a high thermal emission at wavelengths ≫ 5 μm are achieved. Investigations on possible coatings for emissivity enhancement are the focus of the current work.