MIM-based ISFET sensors with CLOSED/OPEN Sense Plates for pH detection
- Resource Type
- Conference
- Authors
- Molina, J.; Espinosa, G.; Torres, A.; Sanz, M T; Guerrero, E.; Perez, B.; Fernandez, J.; McKenna, J.; Hoque, M.; Chen, W.; McNelly, T.; de Souza, R.; Parris, P.
- Source
- 2012 IEEE 3rd Latin American Symposium on Circuits and Systems (LASCAS) Circuits and Systems (LASCAS), 2012 IEEE Third Latin American Symposium on. :1-4 Feb, 2012
- Subject
- Signal Processing and Analysis
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Sensitivity
Sensors
MOSFET circuits
Metals
Chemical sensors
Logic gates
MIM capacitors
- Language
We present electrochemical measurements obtained from chemical sensors that integrate conventional MOSFET devices along with SENSE/RE plates based on MIM (Metal-Insulator-Metal) structures that are all-integrated to the gate oxide of transistors using standard 0.18μm CMOS fabrication processing. Depending on the CMOS-based materials used as sensing plates for pH detection, different sensitivities to hydrogen ion activities are found and they are all related to the bias conditions of the sensor structure.