Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations
- Resource Type
- Conference
- Authors
- Papin, G.; Levy, R.; Bosseboeuf, A.; Fabbri, F.; Parrain, F.; Malak, M.; Bourouina, T.; Lissorgues, G.; Poulichet, P.
- Source
- 2012 IEEE International Frequency Control Symposium Proceedings Frequency Control Symposium (FCS), 2012 IEEE International. :1-5 May, 2012
- Subject
- Robotics and Control Systems
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Optical resonators
Noise
Integrated circuit modeling
Laser beams
Optical interferometry
Oscillators
Optical sensors
- Language
- ISSN
- 2327-1914
2327-1949
1075-6787
Optical actuation and detection of MEMS resonators can improve the resolution of their motion detection compared to standard detection techniques (capacitive, piezoelectric). In this paper, a behavioral model of MEMS resonator with optical actuation and detection and the associated oscillator circuit are presented and used to determine its performances.