Design and Fabrication of MEMS-Based Monolithic Fuel Cells
- Resource Type
- Conference
- Authors
- Kuriyama, Nariaki; Kubota, Tadahiro; Okamura, Daisuke; Suzuki, Toshifumi; Sasahara, Jun
- Source
- TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International. :283-286 Jun, 2007
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Robotics and Control Systems
Signal Processing and Analysis
Fabrication
Fuel cells
Conducting materials
Organic materials
Electromechanical systems
Micromechanical devices
Anodes
Cathodes
Polymers
Biomembranes
Fuel cell
MEMS
Carbon nanotube
Platinum catalyst
Gas diffusion
- Language
- ISSN
- 2159-547X
2164-1641
This paper describes the design, fabrication and performance of small fuel cells using Micro Electromechanical Systems (MEMS) technology. The MEMS-based fuel cell consisted of three components layers, including those of an electromechanically integrated anode cathode, and polymer electrolyte membrane (PEM). We focused on carbon material. Carbon nanotube (CNT) was employed as electrically conductive material suitable for both gas diffusion and catalyst support layer. A prototype was successfully demonstrated with a maximum power output of 0.075 W/cm2 at current density of approximately 0.2 A/cm2.