Compact and MEMS-Scanner-Based 3-D Imaging LiDAR With Wide Scanning Angle of 147.5° × 11.6° Using Multiple Transmitters and a Single Small Photodetector With Diameter of 0.5 mm
- Resource Type
- Periodical
- Authors
- Omaki, M.; Kajiyama, Y.; Imaki, M.; Inoue, Y.; Nakahara, S.; Honda, N.; Niikura, E.; Hirata, Y.; Nomura, J.; Yoshida, M.; Sakamaki, H.; Kobayashi, S.; Matsui, H.; Horiguchi, Y.; Kawai, M.; Tsukamoto, S.; Tsuboi, Y.; Tsuzaki, Y.; Takagawa, Y.; Inoue, H.; Miki, Y.; Yanagisawa, T.; Sugino, T.; Sakanoue, H.; Ishida, K.; Kameyama, S.
- Source
- IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 22(21):20389-20400 Nov, 2022
- Subject
- Signal Processing and Analysis
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Robotics and Control Systems
Laser radar
Optics
Optical filters
Photodetectors
Micromechanical devices
Three-dimensional displays
Mirrors
3-D imaging
light detection and ranging (LiDAR)
micro-electromechanical system (MEMS) scanner
- Language
- ISSN
- 1530-437X
1558-1748
2379-9153
The 3-D imaging light detection and ranging (LiDAR) with a wide scanning angle of 147.5° $\times 11.6$ ° is shown. The LiDAR has the micro-electromechanical system (MEMS) scanner, which is the electromagnetic driving type produced by the silicon-on-insulator (SOI) process. The scanner has a large aperture size of 7 mm $\times $ 5 mm with the mechanical tilt angle of ±12.5° $\times $ ±3.4°. The rib structure of the MEMS mirror realizes the small distortion on the mirror surface in addition to the lightweight. The three laser diodes (LDs) are used to realize the wide scanning angle. The optics has the unique design and covers the three transmitting directions of the LDs with only one small photodetector that has a diameter of 0.5 mm. This single photodetector configuration contributes to the compactness in addition to low cost. The maximum measurable range of 40 m is demonstrated with the frame rate of 28 frames per second (fps) and $282\times 31$ pixels.