Stretchable Electret Energy Harvester Using The Fringe Field
- Resource Type
- Conference
- Authors
- Takebe, Masaya; Miyoshi, Tomoya; Suzuki, Yuji
- Source
- 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 2022 21st International Conference on. :188-191 Dec, 2022
- Subject
- Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Electrodes
Wearable computers
Prototypes
Permittivity
Power generation
Surface treatment
Skin electronics
Energy harvesting
Stretchable
Electret
Fringe field
MEMS
- Language
In this report, a fringe-field-enhanced stretchable electret energy harvester for self-powered skin-attached wearable device has been proposed for the first time. Interdigitated electrode and electret are patterned on stretchable substrate, and the amount of induced charges by the fringe field is changed with the in-plane gap distance change between the electret and the electrode, leading to the external current. An early prototype has been developed with the MEMS process. Output power of tens of μW is expected at 1 Hz and 25% strain when a thin layer of high permittivity liquid is formed onto the surface.