Two-Dimensionally Arrayed Double-Layer Electrode Device Which Enables Reliable and High-Thoroughput Electrortation
- Resource Type
- Conference
- Authors
- Tsuchiya, Taku; Okamoto, Yuki; Marty, Frederic; Mizushima, Ayako; Tixier-Mita, Agnes; Francais, Olivier; Le Pioufle, Bruno; Mita, Yoshio
- Source
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2021 IEEE 34th International Conference on. :486-489 Jan, 2021
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Electrodes
Metals
Levitation
Plasmas
Reliability
Substrates
Surface treatment
Electrorotation
dielectrophoresis
single cell analysis
microfluidics
- Language
- ISSN
- 2160-1968
This paper presents a novel electrorotation device composed of double-layer electrode array. Two electrode layers are formed on the top and bottom of thick dielectric (SU-8) pillars and are electrically connected by through-the-SU-8 vias (TSSV). This unique structure electrically fixes vertical height of cells subjected to electro-rotational (ROT) test, which has been the critical issue. All components of electrodes are formed on a single substrate. This makes cells introducing procedure easy (pipetting from above) and thus microfluidic structure is not required. This allows us to locate electrodes two-dimensionally and densely. Therefore, the proposed device realizes reliable and high-throughput electrorotation analyses.