High-Voltage MEMS Plasma Switch for Boosting the Energy Transfer Efficiency in Triboelectric Nanogenerators
- Resource Type
- Conference
- Authors
- Zhang, Hemin; Marty, Frederic; Galayko, Dimitri; Hodzic, Naida; Basset, Philippe
- Source
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :610-613 Jan, 2020
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Electrostatic switch
triboelectric nanogenerator
high voltage
self-actuated
hysteresis
buck converter
- Language
- ISSN
- 2160-1968
This paper presents for the first time a high-voltage MEMS plasma switch for boosting the energy transfer efficiency of conditioning circuits for triboelectric nanogenerators (TENGs). The novel MEMS switch has a narrow-hysteresis loop for a permanent high-efficiency energy conversion thanks to the combination of electrostatic actuation and plasma-discharge. At the same time, the converted energy is automatically transferred to a low-voltage reservoir through a buck converter. The experimental results show that the MEMS switch improves the harvesting efficiency by two orders of magnitude (145 times) compared to the conventional full-wave rectifying circuit architecture.