A MEMS-Type Ionization Vacuum Sensor With a Wide Measurement Range
- Resource Type
- Periodical
- Authors
- Zhao, Y.; Li, Z.; He, Y.; Mao, S.; Guo, D.; Wei, X.
- Source
- IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 45(5):909-912 May, 2024
- Subject
- Engineered Materials, Dielectrics and Plasmas
Components, Circuits, Devices and Systems
Current measurement
Electron sources
Voltage measurement
Thermionic emission
Silicon
Pressure measurement
Impact ionization
Ionization vacuum sensor
microelectromechanical system (MEMS)
yttrium oxide
thermionic emission
- Language
- ISSN
- 0741-3106
1558-0563
The letter presents a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source. The sensor employs a multilayer-stacked structure fabricated by anodic bonding technology, showing overall dimensions of $12\times 12\times3.3$ mm3. Because of the efficient and stable electron emission of an yttrium oxide electron source, the sensor exhibits a wide linear response range from $1\times 10^{-{4}}$ Pa to 100 Pa with a good repeatability, covering both high and medium vacuum regimes. It provides a new miniature vacuum sensor with a wide measurement range.