High-Q lithium niobate microring-resonators on silicon
- Resource Type
- Conference
- Authors
- Rabiei, Payam; Ma, Jichi; Chiles, Jeff; Khan, Saeed; Fathpour, Sasan
- Source
- CLEO: 2013 Lasers and Electro-Optics (CLEO), 2013 Conference on. :1-2 Jun, 2013
- Subject
- Photonics and Electrooptics
Optical waveguides
Lithium niobate
Silicon
Bonding
Optical resonators
Semiconductor device reliability
- Language
- ISSN
- 2160-8989
Submicron lithium niobate waveguides and resonators are demonstrated on silicon by a novel and reliable ion implantation and wafer bonding technique. Waveguide ridges are formed by selective oxidation of tantalum to avoid etching lithium niobate.