A Mode-Localized Lorentz Force Magnetometer with 1.6μT/√Hz Resolution
- Resource Type
- Conference
- Authors
- Yan, Zimu; Hao, Yongcun; Li, Wenmu; Zhang, Zhao; Chang, Honglong
- Source
- 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :1815-1818 Jun, 2019
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Resonators
Magnetometers
Magnetic resonance
Magnetic field measurement
Magnetic fields
Frequency measurement
Magnetometer
mode localization
weakly-coupled resonators
amplitude ratio
- Language
- ISSN
- 2167-0021
This paper for the first time reports a resonant magnetometer based on the mode localization phenomenon. The proposed sensor utilizes a 3 degrees-of-freedom (DoF) weakly coupled resonators (WCRs) as the mechanical sensing element, with massive grill structures on both sides for converting magnetic field strength to stiffness perturbation. Stiffness perturbation will cause a drastic variation in the mode shape owing to the mode localization phenomenon. We use the amplitude ratio (AR) instead of the frequency as the readout metric, and the sensitivity of AR is 7800 times higher than that of frequency. And the best resolution of the magnetometer is 1.6μT/√Hz in the range of 90mT.